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MS767 Pressure Sensor Die (0-7 bar)

MS767 Pressure Sensor Die (0-7 bar) - click to enlarge
MS767 Pressure Sensor Die (0-7 bar)
Model Number: 

MS767

Brand: 

INTERSEMA

Categories:  Intersema

Product Description:

Features
1) 0 to 7 bar range (102 PSI)
2) High sensitivity (392 mV @ 5 V)
3) Absolute sensor
4) Small Die size 1.72×1.58 mm
5) High reliability, Low Cost

Applications
1) High resolution absolute sensor systems
2) Tire pressure measurements
3) Electronic scales

Description
The sensor element of the MS767 consists of a silicon micro-machined membrane with a Pyrex? glass mounted under vacuum. Implanted resistors make use of the piezo-resistive effect. The MS767 is available as an absolute sensor (MS767A) where a sealed vacuum cavity underneath the membrane is used as reference pressure.

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